The XPS system is a Physical Electronics (PHI 5800) ESCA System. This technique is widely used to determine quantitative atomic composition and qualitative analysis of different elements on the surfaces. It can provide information about surface layers or thin film structures.
This system is equipped with a sputtering ion gun, one dual-anode X-ray source, a monochromatic X-ray, and a dual beam charge neutralizer. This XPS system allows us to perform ISS (ion scattering spectroscopy), element depth profiling, and elemental mapping.