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Cleanroom (MREC)

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Cleanroom (MREC)

OU-MREC is the preeminent university-based microfabrication research, development, and teaching facility located in Norman, Oklahoma. It is directly administrated by the Office of the Vice President for Research at OU. The center contains two state-of-the-art cleanroom laboratories on campus (Devon and Nielsen Cleanrooms) offering over 5,000 sq. ft. with the cleanest space of the Class 1,000 micro-patterning & dry-etching spaces together with Class 10,000 general area devoted for thin-film growth, morphology characterization, and device testing activities.


The MREC Cleanroom laboratories are staffed with microfabrication experts and equipped with advanced research tools capable for the studies, such as functional material growth, metallic thin film deposition, optoelectronic devices development (photodetectors, lasers and solar cells), and biomedical microfluidic device fabrication.


  • E-Beam Evaporator
  • Thermal Evaporator
  • RF/DC Sputtering System
  • Parylene Coater
  • Thermal CVD System
  • Atomic Layer Deposition
  • MJB3 Mask Aligner
  • Programmable Spinner
  • MicroPG-101 Laser Writer
  • ICP-RIE Etching System
  • Plasma Asher Station
  • Rapid Thermal Annealer
  • Wafer Dicing Platform
  • KLA Tencor Profilometer
  • Powder XRD
  • Rocking Curve XRD
  • Scanning Electron Microscope
  • Confocal Optical Microscope
  • IV, CV Probe Station
  • The Nano36 Physical Vapor Deposition (PVD) System
  • The µPG 101 Laser Writer
  • The Trion Minilock-Phantom Dry-Etching System
  • The Karl Suss MJB-3 Mask Aligner



Dr. Binbin Weng
Phone: 405-325-6341


Devon Energy Hall
110 W. Boyd St.
Room 550
Norman, OK 73019